Special issue on precision technology in Tsukuba science city. Precision machining and high-precision optical interferometry.
نویسندگان
چکیده
منابع مشابه
High-Precision Angle Measuring Technology and High-Precision Angle Sensor
High-resolution and high-precision angle sensors are expected for nanotechnology control system. The technology for manufacturing high-precision disks, and the measurement evaluation technology through the angle calibration system, and the development of a high-resolution optical angle sensor with high-precision and a self-accuracy calibrating function was achieved. This was accomplished using ...
متن کاملGround-based Optical/Infrared Interferometry: High Resolution, High Precision Imaging
Over the past decade, optical interferometry has demonstrated that its combination of high resolution and high precision can make unique contributions to astrophysics. Interferometers have grown in aperture size, baseline length, number of apertures, and spectral resolution. At the same time, methods to circumvent the limitations of interferometry are being introduced. Further increases in sens...
متن کاملPrecision Science and Technology for Perfect Surfaces
Aspheric mirrors for extreme ultraviolet lithography (EUVL) at a wavelength of 13nm require surface figure accuracy approaching 0.10nm rms. A new type of interferometry, based on the fundamental process of diffraction, is described that has the intrinsically ability to achieve this accuracy on aspherical surfaces. However, care must be taken in the design and implementation of the optical syste...
متن کاملHigh Precision Optical Measurement Methods
I. INIRODllCTION Noncontact optical methods are appropriate for mic;ro.. and macrostructure measurements. Time of flight and phase measuring techniques with a resolution in the order of a few mm to one mm. respectively arc well introduced. Furthermore active and passive triangulation techniques arc very robust and appropriate for different applications in precision measurements. Some optical 3-...
متن کاملPrecision medicine, technologies, and molecular diagnostics
Introduction: Genetics, cellular and molecular medicines are cutting-edge sciences and technologies that play an important role in improving human health and quality of life. In addition, medical and biological sciences have clearly shown that the onset of diseases differs from person to person due to their different genetic profiles and variations in molecular basis. Therefore, it is feasible ...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1985
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.51.271